Practical experience establishing in-line single layer and multilayer film thickness,
uniformity, resistivity, and contact angle measurement processes including; Spectroscopic
Ellipsometry / Interferometry / four point probe resistivity / kelvin probe / optical
measurement of wetting angle.
'Hands-on' experience automated optical inspection techniques for inline critical feature
dimension monitoring, defect particle identification, photolithography and etch feature
integrity, and critical micro-circuit and transistor layer structures.
Practical experience developing process test structures, identifying critical process stages,
yield failure steps, potential re-work steps, and applying overall in-line statistical process
Practical knowledge of transistor array checker and repair techniques; including in-line
probe card voltage imaging and optical inspection of driven active transistor array;
identification of transistor array shorts and opens; use of localised laser cutting and ink-
jet repair techniques.